INFICON - MPG500 / MAG500 VACUUM PRESSURE GAUGE

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Spesifikasi INFICON - MPG500 / MAG500 VACUUM PRESSURE GAUGE

Gemini MAG5xx MPG5xx Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge The INFICON Gemini™ Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. While Gemini MPG50x combines two sensor systems in one small device to measure from atmosphere down to 1×10– 9 mbar, the Gemini MAG50x is a pure cold cathode sensor System (without Pirani element) which covers the range from 1×10-2 mbar to 1×10– 9 mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind. Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. The Cold cathode and Pirani combination version (MPG) option provides seamless transition, reliability, practicality and flexibility across wide ranging applications. MAG and MPG Gemini are now available with EtherCAT fieldbus and setpoints as MAG55x and MPG55x. For corrosive applications we suggest to use the ceramic coated version MxG5x4. Feedthrough and Pirani inside the sensor head are fully ceramic coated for enhanced corrosion resistance. Gemini™ Cold Cathode and combination sensor`s come with fully integrated digital electronics, providing ultimate flexibility for System Integration. Both, cold cathode and Pirani combination sensor Option provide seamless Transition, reliability, proactivity and flexibility across wide ranging applications. Benefits Long lifetime in harsh environments Low magnetic stray field Reliable fast ignition Fastest maintenance – replaceable insert Compact size – easy to integrate Corrosion proof feed-through & sensor element Selectable measuring current 2 relay setpoints (in conjunction with MxG55x EtherCAT Version) EtherCAT and RS232/ RS485 digital interface Typical Applications Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications. General vacuum measurement – industrial furnaces, architectural glass, semiconductor, refrigeration and air conditioning. Analytical and R&D applications – mass spectrometry, electron microscopes, medical, ophthalmic, optical and high energy physics. Part Number Dimensions Specifications
Type MAG50x MPG50x
Measurement system Cold cathode ionization measurement system (according to the inverted magnetron principle) Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
Measurement range (air, N2) mbar 1×10-9 … 1×10-2 1×10-9 … 1000
Accuracy (N2)
1×10-8 … 1×10-2 mbar % of reading 30
1×10-2 … 100 mbar % of reading 30
100 … 1000 mbar % of reading 50
Repeatability (N2)
1×10-8 … 1×10-2 mbar % of reading 5
1×10-8 … 100 mbar % of reading 5
Mounting orientation any any
Admissible pressure bar (absolute) 10 (limited to inert gases <55°C) 10 (limited to inert gases <55°C)
Admissible temperature
Operation (ambient) °C +5 … +55 +5 … +55
Bakeout at flange (1) °C <150 <150
Storage °C -40 … +70 -40 … +70
Filament temperature °C 120
Relative humidity for 30 days a year
1×10-7 … 1×10-2 mbar % <95 (non-condensing) <95 (non-condensing)
1×10-8 … 1×10-2 mbar % <70 (non-condensing) <70 (non-condensing)
Supply voltage
At gauge (2) V (dc) +14.5 … +30 +14.5 … +30
Ripple V (p-p) <1 <1
Power consumption W <2 <2
Fuse to be connected AT <1 <1
Voltage range
analog output V 0 … +10.5 0 … +10.5
Measurement range
3MAx-xxx-xxxN V <+0.5
3MBx-xxx-xxxP V
3MAx-xxx-xxxQ V +0.667 … +10
Voltage vs. pressure
3MAx-xxx-xxxN volts per decade 1 (logarithmic)
3MBx-xxx-xxxP volts per decade
3MAx-xxx-xxxQ volts per decade 1.33 (logaritmic)
Error signal
3MAx-xxx-xxxN V <+0.5
3MAx-xxx-xxxQ V <+0.3
3MBx-xxx-xxxP V
Output impendance 2 x 4.7 (short circuit-proof)
Load impendance kΩ >10 (short circuit-proof)
Step response time
p > 10-6 mbar ms <100 <100
p = 10-6…10-8 mbar ms ~1 ~1
Gauge identification (FCC connector gauges)
3MAx-0xx-000N kΩ
3MAx-0xx-000Q kΩ 100
3MBx-0xx-000P kΩ
Status signal, digital output (FCC connector)
Current rating mA 100 (sink)
High Voltage is ON V(dc) +14.5 … +30 (depending on supply voltage)
High Voltage is OFF V(dc) 0
Status signal, digital output (D-sub connector)
Supply voltage V(dc) <30
Current rating mA 100
High voltage ON V(dc) 0
High voltage OFF open
Electrical connection
3Mxx-0xx-000x FCC68, 8-pin, female
3Mxx-0xx-010x D-sub, 9-pin, male
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)
Sensor cable
3Mxx-0xx-000x 8-pin, shielded
3Mxx-0xx-010x 9-pin, shielded
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)
Cable lenght
FCC connector cable m <50 (0.14 mm2/ conductor)
High voltage (in the measuring chamber)
Ignition voltage kV <4.5
Operating voltage kV <3.3 <3.3
Current (in the measuring chamber)
High current µA <380
Low current µA <130
Setpoint relays (MxG55x)
Range (N2) mbar 5×10-5 … 1500
Relay contact normally open (NO), potential free
Hysteresis % of threshold 10
Contact rating of mechanical relays V/A <30/ <1
Switching time ms <30
Materials exposed to vacuum
3Mx0-xxx-xxxx Ni alloy, AI2O3, glass, stainless steels
3Mx3-xxx-xxxx Mo, AI2O3, stainless steels
3Mx0-11x-xxxx Ni alloy, Mo, Al2O3, glass, Ti, stainless steels
3Mx3-11x-xxxx Mo, Al2O3, Ti, stainless steels
Internal volume
DN 25 ISO-KF cm³
DN 40 ISO-KF cm³ ~20.9
DN 40 CF-F cm³ ~25.2
DN 40 CF-R cm³ ~25.6
Internal volume cm³ 22.8
Weight (MxG50x)
DN 25 ISO-KF g <280 <280
DN 40 ISO-KF g <320 <320
DN 40 CF-F & CF-R g <570 <570
Weight (MxG50x)
DN 25 ISO-KF g <280 <280
DN 40 ISO-KF g <320 <320
DN 40 CF-F & CF-R g <570 <570
Degree of protection IP 40 IP 40
CE conformity
RoHS 2011/65/EU
EMC 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1
Safety EN 61010-1
RS232C / 485C (MxG50x)
Baud rates kBaud 9.6/ 19.2/ 38.4/ 57.6
Address 2 switches (address 00 – 255)
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behavior in case of error.
Connector for RS232 & RS485 D-Sub HD, 15-pin, male
EtherCAT® (MxG55x)
Protocol EtherCAT®
Communication standard ETG.5003.1 S (R) V1.1.0 4) ETG.5003.2080 S (R) V1.3.0 5)
Node address Explicit Device Identification
Physical layer 100Base-Tx (IEEE 802.3)
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behavior in case of error.
EtherCAT connector 2 x RJ45, 8-pin (socket), Input & output
EtherCAT cable Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher).
Cable lenght m <100
1) Without electronics. 2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. 3) Cold cathode ignited. 4) Semiconductor Device Profile 5) Specific Device Profile: Vacuum Pressure Gauge Accessories
MAG5xx
Part Number Description
211-098 Centering ring with fine filter DN 25 KF
351-550 MxG50x Ignition tool set
211-113 Centering ring with baffle DN 25 KF
353-512 Baffle for BPG400
MPG5xx
Part Number Description
211-098 Centering ring with fine filter DN 25 KF
351-550 MxG50x Ignition tool set
211-113 Centering ring with baffle DN 25 KF
353-512 Baffle for BPG400
Spare Parts
MAG5xx
Part Number Description
351-500 MAG500 spare sensor, 25KF, SS
351-556 Spare ion chamber TI
351-512 MAG500 spare sensor, 40KF, SS
351-536 MAG500 spare sensor, 40CF-R, SS
351-524 MAG500 spare sensor, 40CF-F, SS
351-502 MAG500 spare sensor, 25KF, TI
351-514 MAG500 spare sensor, 40KF, TI
351-538 MAG500 spare sensor, 40CF-R, TI
351-526 MAG500 spare sensor, 40CF-F, TI
351-501 MAG504 spare sensor, 25KF, SS
351-513 MAG504 spare sensor, 40KF, SS
351-537 MAG504 spare sensor, 40CF-R, SS
351-525 MAG504 spare sensor, 40CF-F, SS
351-503 MAG504 spare sensor, 25KF, TI
351-515 MAG504 spare sensor, 40KF, TI
351-539 MAG504 spare sensor, 40CF-R, TI
351-527 MAG504 spare sensor, 40CF-F, TI
351-995 MxG40x/50x Spare parts ignition aid (10)
351-555 Spare ion chamber SS
MPG5xx
Part Number Description
351-506 MPG500 spare sensor, 25KF, SS
351-518 MPG500 spare sensor, 40KF, SS
351-542 MPG500 spare sensor, 40CF-R, SS
351-530 MPG500 spare sensor, 40CF-F, SS
351-508 MPG500 spare sensor, 25KF, TI
351-520 MPG500 spare sensor, 40KF, TI
351-544 MPG500 spare sensor, 40CF-R, TI
351-532 MPG500 spare sensor, 40CF-F, TI
351-507 MPG504 spare sensor, 25KF, SS
351-519 MPG504 spare sensor, 40KF, SS
351-543 MPG504 spare sensor, 40CF-R, SS
351-543 MPG504 spare sensor, 40CF-F, SS
351-509 MPG504 spare sensor, 25KF, TI
351-521 MPG504 spare sensor, 40KF, TI
351-545 MPG504 spare sensor, 40CF-R, TI
351-533 MPG504 spare sensor, 40CF-F, TI
351-995 MxG40x/50x Spare parts ignition aid (10)
351-555 Spare ion chamber SS
351-556 Spare ion chamber TI
Datasheets Datasheet_MPG50x EN Datasheet_MPG50x DE Datasheet_MPG50x ES Brochures Brochure MAG50x_MPG50x Cold Cathode gauge EN Manuals Gemini MxG5xx Operating manual EN Gemini MxG5xx Gebrauchsanleitung DE Mx55x_Communication protocol EtherCAT_New Generation EN Communication protocol RS232_RS485_MxG50x EN
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